CVD Systems --- Plasm Enhanced (PECVD)

High Vacuum Tube FurnacePart #: PECVD-VTF1200D80Ø  Double shell structure for good surface coolingØ  Furnace mounted on horizontal position with sliding trailØ  Maximum temperature 1200 °CØ  Continuous working (long term) temperature <1100 °CØ  Programmable temperature control with 30 segmentsØ  Temperature control +/-1.0 °CØ  Two end vacuum flanges, fittings installedØ  Heating zone length 440mm (Constant temperature zone 12inch)Ø  Heating elements 1200°C grade Al-Fe-Cr alloyØ  Electricy, AC220V+/-10%, 50/60Hz, 15AØ  One year Col-Int Tech limited warrantyRadio Frequency Plasm Generator and ControllerPart #: PECVD-PERF300Ø  RF power generator 5-300W outputØ  RF frequency 13.56MHzØ  RF output port 50Ω N-type female connectorØ  Power supply AC208-240V 50/60Hz, 3AØ  One year limited manufacturer warrantyGas Mixer and ControllerPart #: PECVD-GM4A-SIERRAØ  4-channel gas mixer, mixing chamber SUS304Ø  Mass flow meter and controller by SIERRA®Ø  Gas channels 1: Ar 0~100 SCCM, 2: Hydrogen 0