Hitachi EC1 Controller Module Etch Chamber 1 IOTU-OIN M-712E Trench Etcher Used

Hitachi EC1 Controller Module Etch Chamber 1 IOTU-OIN M-712E Trench Etcher Used Inventory # 12121 This Hitachi EC1 Controller Module is used working surplus. The physical condition is great, but there are signs of previous use and handling. Removed from a Hitachi M-712E Trench Etcher. Specifications Part No: EC1 Controller Module EC1 Etch Chamber 1 Removed from a Hitachi M-712E Shallow Trench EtcherInstalled PCB Cards Part No: IOTU-01N, Daughterboard Part No: IOCN-01A Part No: DIO-01N (QTY 2) Part No: ILE-02 Part No: EPD-02N Part No: AIO-02N Backplane PCB  Part No: BBET-11 Cosel Power supply Part No: P15E-5 Sale Details Item Condition: Used Working, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 16"x16"x16" @ 18 lbs. Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale. For items with multiple quantities