Hitachi Wafer Alignment Unit with SunX Laser Line Controller FEM-312 EFEM Used
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Hitachi Wafer Alignment Unit with SunX Laser Line Controller FEM-312 EFEM Used

$2,808.18
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img{max-width:100%} Hitachi Wafer Alignment Unit with SunX Laser Line Controller FEM-312 EFEM Used Inventory # A-12824 This Hitachi Wafer Alignment Unit with SunX Laser Line Controller FEM-312 EFEM is used working surplus. The physical condition is good, but there are signs of previous use and handling.  Specifications Part No: Alignment Unit Configured for 300mm Wafers Removed from a Hitachi FEM-312 EFEM Equipment Front End Module Installed Components Hitachi PCB Part No: HT98311, BD11 Rorze 2P Micro Step Drive Part No: RD-023MS SunX Laser Line Sensor Part No: LD-601 SunX Laser Line Sensor Controller Part No: LD-C60 Sale Details Item Condition: Used Working, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 21"x21"x36" @ 125 lbs. Requires Freight Shipping Only items pictured are included: If a part is not pictured, or mentioned

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