E03200 - SEMI E32 - Material Movement Management (MMM)

This Standard was technically approved by the Information & Control Global Technical Committee. Available at www.semi.org in September 1997; originally published in 1994. 　 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 　 Automated material movement represents a significant milestone in the evolution of automation in semiconductor manufacturing. The standardization of the transfer process is critical to the economic viability of material movement automation. This Standard addresses the communications needs of the semiconductor manufacturing facility with respect to material movement. 　 This Standard addresses automated material movement on the semiconductor factory floor—the task of transporting objects (material, et al.) from one processing or storage location to another. It defines the concepts of