E13300 - SEMI E133 - Specification for Automated Process Control Systems Interface

 In order to more efficiently facilitate the integration of process control systems (PCS) such as run-to-run (R2R) control, fault detection (FD), fault classification (FC), fault prediction (FP), statistical process control (SPC), etc. into current and future fabs, there is a need to define interfaces for PCS that enable them to interact effectively and share data (1) among themselves and (2) with the other interdependent factory systems (including equipment data collection). This Standard is intended for use by equipment suppliers, semiconductor manufacturers, equipment subsystem suppliers and control system suppliers who will utilize the PCS standards in future developed products. This Standard focuses on defining PCS capabilities, functional groups (FGs), and FG interfaces. The Standard is structured so that new FGs can be added to the Standard through future balloting. The components in this Document include:• Definitions of key terms and concepts pertinent to this domain,• Descrip