
T01200 - SEMI T12 - Specification for Tracing Jigs and Implements
This standard was technically approved by the global Traceability Committee and is the direct responsibility of the Japanese Traceability Committee. Current edition approved by the Japanese Regional Standards Committee on November 24, 2004. Initially available at www.semi.org January 2005. Originally published March 2004; previously published July 2004. NOTICE: The designation of SEMI T12 was updated during the 0710 publishing cycle to reflect the reapproval of SEMI T12.1. Semiconductor production equipment may use Jigs and/or Implements to produce semiconductor devices. Some case such important conditions as quality of products and tool performance may depend on Jigs or Implements. This difference often comes from such historical events as processing cycles, processing products, stocking environment. To make sure correlation between the conditions and the events tracing Jigs and Implements is required. Purpose of this document is to establish concept to trace Jigs and/or Implem